평면 마그네트론 스퍼터링 시스템에서의 타겟 효율 향상을 위한 연구 = Enhancement of target utilization in a planar magnetron sputtering system

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 신소재공학과,
Publisher
한국과학기술원
Issue Date
2004
Identifier
238324/325007  / 020023291
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 신소재공학과, 2004.2, [ v, 52 p. ]

Keywords

마그네트론 스퍼터링; MAGNETRON SPUTTERING

URI
http://hdl.handle.net/10203/51610
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=238324&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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