학위논문(석사) - 한국과학기술원 : 신소재공학과, 1997.2, [ viii, 103 p. ]
Silicone oil; Dry development; Adsorption; Top surface imaging; Photolithography; 광미세가공; 실리콘 오일; 건식현상; 흡착; 표면이미징
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