CZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구 = GETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer

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Advisors
유진researcherYu, Jinresearcher
Description
한국과학기술원 : 신소재공학과, 1993
Publisher
한국과학기술원
Issue Date
1993
Identifier
69618/325007 / 000927094
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 신소재공학과, 1993, [ ii, 75 p. ]

URI
http://hdl.handle.net/10203/51543
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69618&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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