CZ실리콘 웨이퍼에서의 표면결정결합의 GETTERING거동에 대한 연구GETTERING efficiency improvement by induced surface stacking faults in CZ-silicon wafer
- Advisors
- 유진researcher; Yu, Jinresearcher
- Description
- 한국과학기술원 : 신소재공학과, 1993
- Publisher
- 한국과학기술원
- Issue Date
- 1993
- Identifier
- 69618/325007 / 000927094
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 신소재공학과, 1993, [ ii, 75 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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