열 필라멘트법으로 제조한 다이아몬드 박막의 잔류응력Residual stress of diamond film deposited by hot-filament CVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최시경 | - |
| dc.contributor.advisor | Choi, Si-Kyung | - |
| dc.contributor.author | 정대영 | - |
| dc.contributor.author | Jung, Dae-Young | - |
| dc.date.accessioned | 2011-12-15T01:45:10Z | - |
| dc.date.available | 2011-12-15T01:45:10Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99463&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51532 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 무기재료공학과, 1995.2, [ ii, 56 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 열 필라멘트법으로 제조한 다이아몬드 박막의 잔류응력 | - |
| dc.title.alternative | Residual stress of diamond film deposited by hot-filament CVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99463/325007 | - |
| dc.description.department | 한국과학기술원 : 무기재료공학과, | - |
| dc.identifier.uid | 000933448 | - |
| dc.contributor.localauthor | 정대영 | - |
| dc.contributor.localauthor | Jung, Dae-Young | - |
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- MS-Theses_Master(석사논문)
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