Trichlorosilane의 수소환원에 의한 고순도 규소 제조에 대한 연구The preparation of high-purity silicon by hydrogen reduction of trichlorosilane

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dc.contributor.advisor주웅길-
dc.contributor.advisorChoo, Woong-Kil-
dc.contributor.author이종화-
dc.contributor.authorLee, Jong-Hwa-
dc.date.accessioned2011-12-15T01:43:45Z-
dc.date.available2011-12-15T01:43:45Z-
dc.date.issued1976-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=62078&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/51445-
dc.description학위논문(석사) - 한국과학기술원 : 재료공학과, 1976.2, [ [ii], 57 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subjectPurity (Crystals)-
dc.subject수소 환원.-
dc.titleTrichlorosilane의 수소환원에 의한 고순도 규소 제조에 대한 연구-
dc.title.alternativeThe preparation of high-purity silicon by hydrogen reduction of trichlorosilane-
dc.typeThesis(Master)-
dc.identifier.CNRN62078/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000741108-
dc.contributor.localauthor주웅길-
dc.contributor.localauthorChoo, Woong-Kil-
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MS-Theses_Master(석사논문)
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