화학 증착법에 의한 $TiO_2$ 박막 제조시 기상에서의 반응이 증착 특성에 미치는 영향Effects of gas phase reaction on deposition characteristics during $TiO_2$ Thin film preparation by CVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Ho-Gi | - |
| dc.contributor.author | 조정호 | - |
| dc.contributor.author | Cho, Jeong-Ho | - |
| dc.date.accessioned | 2011-12-15T01:43:08Z | - |
| dc.date.available | 2011-12-15T01:43:08Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60430&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51406 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 무기재료공학과, 1992.2, [ iii, 69 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 화학 증착법에 의한 $TiO_2$ 박막 제조시 기상에서의 반응이 증착 특성에 미치는 영향 | - |
| dc.title.alternative | Effects of gas phase reaction on deposition characteristics during $TiO_2$ Thin film preparation by CVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60430/325007 | - |
| dc.description.department | 한국과학기술원 : 무기재료공학과, | - |
| dc.identifier.uid | 000901537 | - |
| dc.contributor.localauthor | 김호기 | - |
| dc.contributor.localauthor | Kim, Ho-Gi | - |
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