TiN Glue Layer위에 화학증착된 텅스텐박막에 관한 연구A study on the tungsten films prepared by LPCVD on TiN glue layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 장규환 | - |
| dc.contributor.author | Chang, Kyu-Hwan | - |
| dc.date.accessioned | 2011-12-15T01:42:54Z | - |
| dc.date.available | 2011-12-15T01:42:54Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60415&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51391 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iii], 53 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | TiN Glue Layer위에 화학증착된 텅스텐박막에 관한 연구 | - |
| dc.title.alternative | A study on the tungsten films prepared by LPCVD on TiN glue layer | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60415/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000901453 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
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