DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 권혁상 | - |
dc.contributor.advisor | Kwon, Hyuk-Sang | - |
dc.contributor.author | 한승전 | - |
dc.contributor.author | Han, Seung-Zeon | - |
dc.date.accessioned | 2011-12-15T01:42:44Z | - |
dc.date.available | 2011-12-15T01:42:44Z | - |
dc.date.issued | 1992 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60405&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/51381 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1992.2, [ vi, 62 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 탄화 규소 | - |
dc.title | 상온 RF 반응 스퍼터링법으로 제조한 수소화 비정질 탄화규소 박막의 광학적 성질 및 열처리후 광학적 특성 변화 연구 | - |
dc.title.alternative | A study on the characteristics of the optical properties in as-deposited and post annealed hydrogenated amorphous silicon carbide films prepared by RF reactive sputtering at room temperature | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 60405/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000901582 | - |
dc.contributor.localauthor | 권혁상 | - |
dc.contributor.localauthor | Kwon, Hyuk-Sang | - |
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