DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 천성순 | - |
dc.contributor.advisor | Chun, Soung-Soon | - |
dc.contributor.author | 정수옥 | - |
dc.contributor.author | Chung, Su-Ock | - |
dc.date.accessioned | 2011-12-15T01:41:00Z | - |
dc.date.available | 2011-12-15T01:41:00Z | - |
dc.date.issued | 1995 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99500&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/51276 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ viii, 96 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Metals | - |
dc.title | ECR 플라즈마 화학증착법에 의해 제조된 PZT 박막의 미세구조에 관한 연구 | - |
dc.title.alternative | The study of the microstructure of the PZT thin film deposited by ECR PECVD | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 99500/325007 | - |
dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
dc.identifier.uid | 000933454 | - |
dc.contributor.localauthor | 정수옥 | - |
dc.contributor.localauthor | Chung, Su-Ock | - |
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