RF PECVD 법에 의해 증착된 TiN 박막 특성에 관한 연구 = A study on the characteristics of the TiN thin films deposited by RF PECVD

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
99499/325007 / 000933436
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 75 p. ]

URI
http://hdl.handle.net/10203/51275
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99499&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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