플라즈마 화학 증착법으로 제조한 P-doped α-Si:H 박막의 고상결정화Solid phase crystallization of P-doped α-Si:H films deposited by PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 이범주 | - |
| dc.contributor.author | Lee, Bum-Joo | - |
| dc.date.accessioned | 2011-12-15T01:40:55Z | - |
| dc.date.available | 2011-12-15T01:40:55Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99493&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51270 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ v, 83 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 플라즈마 화학 증착법으로 제조한 P-doped α-Si:H 박막의 고상결정화 | - |
| dc.title.alternative | Solid phase crystallization of P-doped α-Si:H films deposited by PECVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99493/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933351 | - |
| dc.contributor.localauthor | 이범주 | - |
| dc.contributor.localauthor | Lee, Bum-Joo | - |
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