플라즈마 화학 증착법으로 제조한 P-doped α-Si:H 박막의 고상결정화 = Solid phase crystallization of P-doped α-Si:H films deposited by PECVD

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1995
Identifier
99493/325007 / 000933351
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ v, 83 p. ]

URI
http://hdl.handle.net/10203/51270
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99493&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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