플라즈마 화학 증착법으로 제조한 P-doped α-Si:H 박막의 고상결정화Solid phase crystallization of P-doped α-Si:H films deposited by PECVD
- Advisors
- 안병태researcher; Ahn, Byung-Taeresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99493/325007 / 000933351
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ v, 83 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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