구리 박막의 건식 플라즈마 식각에 관한 연구A study of plasma dry etching of copper film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정용 | - |
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.author | 박홍배 | - |
| dc.contributor.author | Park, Hong-Bae | - |
| dc.date.accessioned | 2011-12-15T01:40:54Z | - |
| dc.date.available | 2011-12-15T01:40:54Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99492&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51269 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 59 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 구리 박막의 건식 플라즈마 식각에 관한 연구 | - |
| dc.title.alternative | A study of plasma dry etching of copper film | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99492/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933223 | - |
| dc.contributor.localauthor | 박홍배 | - |
| dc.contributor.localauthor | Park, Hong-Bae | - |
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