CVD Cu 박막의 특성에 열처리 온도가 미치는 영향The effects of the annealed temperature on properties of CVD Cu films
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99489/325007 / 000933180
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 63 p. ]
- Keywords
Chemical vapor deposition
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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