Microwave plasma를 이용하여 증착한 diamond 박막의 증착변수에 따른 증착특성 연구 = A study on the deposition characteristics of diamond film deposited by microwave plasma CVD

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Advisors
이원종researcherLee, Won-Jongresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1994
Identifier
69523/325007 / 000923141
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ iii, 58 p. ]

URI
http://hdl.handle.net/10203/51253
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69523&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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