화학증착법에 의한 Silicon carbide 내산화 코팅에 관한 연구 = A study on the silicon carbide anti-oxidation coatings by chemcial vapor deposition

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Advisors
이원종researcher박종욱researcherLee, Won-JongresearcherPark, Chong-Ookresearcher
Description
한국과학기술원 : 전자재료공학과,
Publisher
한국과학기술원
Issue Date
1993
Identifier
68568/325007 / 000911212
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1993.2, [ [iii], 56 p. ]

Keywords

Chemical vapor deposition.

URI
http://hdl.handle.net/10203/51242
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68568&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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