Glue layer TiW sputtering 조건이 저압 화학 증착 방법에 의해 증착된 텅스텐 박막의 성질에 미치는 영향에 관한 연구 = A study on the effect of sputtering conditions of glue layer TiW on the properties of LPCVD-W films

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 전자재료공학과 ,
Publisher
한국과학기술원
Issue Date
1993
Identifier
68555/325007 / 000911275
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과 , 1993.2, [ [iii], 62 p. ]

Keywords

Chemical vapor deposition.

URI
http://hdl.handle.net/10203/51229
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68555&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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