Silicon 화학 증착에 있어 기상 반응 모델 및 광학적, 전기적 특성에 관한 연구A study on the gas-phase reaction modeling and the optical and electrical properties of chemically vapor-deposited silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 남수우 | - |
| dc.contributor.advisor | Nam, Soo-Woo | - |
| dc.contributor.author | 민경진 | - |
| dc.contributor.author | Min, Gyung-Jin | - |
| dc.date.accessioned | 2011-12-15T01:38:57Z | - |
| dc.date.available | 2011-12-15T01:38:57Z | - |
| dc.date.issued | 1989 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67000&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51147 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1989.2, [ iv, 67 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Silicon 화학 증착에 있어 기상 반응 모델 및 광학적, 전기적 특성에 관한 연구 | - |
| dc.title.alternative | A study on the gas-phase reaction modeling and the optical and electrical properties of chemically vapor-deposited silicon | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67000/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000871152 | - |
| dc.contributor.localauthor | 남수우 | - |
| dc.contributor.localauthor | Nam, Soo-Woo | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.