$Si_3N_4$ 의 화학증착과 증착층의 전기적 성질에 대한 연구A study on chemical vapor deposition of $Si_3N_4$ thin film and its electrical properties
- Advisors
- 김호기researcher; Kim, Ho-Giresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1985
- Identifier
- 64856/325007 / 000831034
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1985.2, [ [iii], 46 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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