고온열처리가 측면고상결정화시킨 다결정 Si 박막의 미세구조와 박막트랜지스터 특성에 미치는 영향 연구Effect of high-temperature annealing on the microstructure of polycrystalline Si films crystallized by lateral growth and its effect on TFT characteriscs
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 이계웅 | - |
| dc.contributor.author | Lee, Kye-Ung | - |
| dc.date.accessioned | 2011-12-15T01:35:26Z | - |
| dc.date.available | 2011-12-15T01:35:26Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180293&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50928 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2003.2, [ iii, 78 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 박막트랜지스터 | - |
| dc.subject | 측면고상결정화 | - |
| dc.subject | metal induced lateral crystallization | - |
| dc.subject | high-temperature annealing | - |
| dc.subject | poly-Si TFT | - |
| dc.title | 고온열처리가 측면고상결정화시킨 다결정 Si 박막의 미세구조와 박막트랜지스터 특성에 미치는 영향 연구 | - |
| dc.title.alternative | Effect of high-temperature annealing on the microstructure of polycrystalline Si films crystallized by lateral growth and its effect on TFT characteriscs | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180293/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 020013400 | - |
| dc.contributor.localauthor | 안병태 | - |
| dc.contributor.localauthor | Ahn, Byung-Tae | - |
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