고집적 FRAM용 LSCO/Ir/TaSiN 하부전극의 안정성에 관한 연구Stability of TaSiN diffusion barrier with LSCO/Ir hybrid bottom electrode for FRAM application
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김호기 | - |
| dc.contributor.advisor | Kim, Hi-Gi | - |
| dc.contributor.author | 김명선 | - |
| dc.contributor.author | Kim, Myung-Sun | - |
| dc.date.accessioned | 2011-12-15T01:33:37Z | - |
| dc.date.available | 2011-12-15T01:33:37Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165562&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50819 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ iv, 77 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 확산방지막 | - |
| dc.subject | TaSiN | - |
| dc.subject | LSCO | - |
| dc.subject | Barrier | - |
| dc.title | 고집적 FRAM용 LSCO/Ir/TaSiN 하부전극의 안정성에 관한 연구 | - |
| dc.title.alternative | Stability of TaSiN diffusion barrier with LSCO/Ir hybrid bottom electrode for FRAM application | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 165562/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000993074 | - |
| dc.contributor.localauthor | 김호기 | - |
| dc.contributor.localauthor | Kim, Hi-Gi | - |
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- MS-Theses_Master(석사논문)
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