LPCVD 공정의 3차원 증착형상 예측을 위한 전산모사Simulation for the 3-D deposition topography of LPCVD process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 권의희 | - |
| dc.contributor.author | Kwon, Ui-Hui | - |
| dc.date.accessioned | 2011-12-15T01:32:38Z | - |
| dc.date.available | 2011-12-15T01:32:38Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=158587&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50760 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ ix, 109 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 증착 | - |
| dc.subject | 전산모사 | - |
| dc.subject | 저압화학증착 | - |
| dc.subject | 층덮힘 | - |
| dc.subject | 부착계수 | - |
| dc.subject | Deposition | - |
| dc.subject | LPCVD | - |
| dc.subject | Simulation | - |
| dc.subject | Monte Carlo method | - |
| dc.subject | Step coverage | - |
| dc.title | LPCVD 공정의 3차원 증착형상 예측을 위한 전산모사 | - |
| dc.title.alternative | Simulation for the 3-D deposition topography of LPCVD process | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 158587/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000983042 | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
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