DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 박종욱 | - |
dc.contributor.advisor | Park, Chong-Ook | - |
dc.contributor.author | 장유진 | - |
dc.contributor.author | Chang, You-Jean | - |
dc.date.accessioned | 2011-12-15T01:32:32Z | - |
dc.date.available | 2011-12-15T01:32:32Z | - |
dc.date.issued | 1999 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=156254&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50754 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.8, [ iv, 68 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 확산방지막 | - |
dc.subject | 스퍼터링 | - |
dc.subject | 탄탈륨 | - |
dc.subject | 구리 | - |
dc.subject | Cu | - |
dc.subject | Diffusion barrier | - |
dc.subject | Sputtering | - |
dc.subject | Ta-N | - |
dc.title | Ta-N 박막의 Cu 확산방지 특성에 관한 연구 | - |
dc.title.alternative | A study on the barrier properties of Ta-n thin films against Cu diffusion | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 156254/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000973594 | - |
dc.contributor.localauthor | 박종욱 | - |
dc.contributor.localauthor | Park, Chong-Ook | - |
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