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학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ iv, 79 p. ]
크롬; 흡수층; 몰리브덴; 포토마스크; 건식식각; Dry etch; Chromium; Absorber; Molybdenum; Photomask
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