Si 기판위에 Hot filmanent CVD법으로 제조된 다이아몬드 박막의 응력 해석Stress analysis in diamond thin films on Si wafer deposited by hot filament chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 홍순형 | - |
| dc.contributor.advisor | Hong, Soon-Hyung | - |
| dc.contributor.author | 차승일 | - |
| dc.contributor.author | Cha, Seung-Il | - |
| dc.date.accessioned | 2011-12-15T01:31:29Z | - |
| dc.date.available | 2011-12-15T01:31:29Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133561&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50690 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ 85 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 열처리 | - |
| dc.subject | 잔류응력 | - |
| dc.subject | 다이아몬드박막 | - |
| dc.subject | 화학기상증착 | - |
| dc.subject | Annealing | - |
| dc.subject | CVD | - |
| dc.subject | Stress | - |
| dc.subject | Diamond thin film | - |
| dc.title | Si 기판위에 Hot filmanent CVD법으로 제조된 다이아몬드 박막의 응력 해석 | - |
| dc.title.alternative | Stress analysis in diamond thin films on Si wafer deposited by hot filament chemical vapor deposition | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 133561/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000963612 | - |
| dc.contributor.localauthor | 홍순형 | - |
| dc.contributor.localauthor | Hong, Soon-Hyung | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.