In-situ radio-frequency 세정에 의한 $TiSi_2$ 연구A study of $TiSi_2$ formation by in-situ radio-frequency cleaning
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이정용 | - |
| dc.contributor.advisor | Lee, Jeong-Yong | - |
| dc.contributor.author | 배종욱 | - |
| dc.contributor.author | Bae, Jong-Uk | - |
| dc.date.accessioned | 2011-12-15T01:31:17Z | - |
| dc.date.available | 2011-12-15T01:31:17Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133548&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50678 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1998.2, [ iii, 95 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 자연산화막 | - |
| dc.subject | 급속열처리 | - |
| dc.subject | 티타늄 실리사이드 | - |
| dc.subject | Radio-frequence 세정 | - |
| dc.subject | RF cleaning | - |
| dc.subject | Native oxide | - |
| dc.subject | RTA | - |
| dc.title | In-situ radio-frequency 세정에 의한 $TiSi_2$ 연구 | - |
| dc.title.alternative | A study of $TiSi_2$ formation by in-situ radio-frequency cleaning | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 133548/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000963288 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.localauthor | Lee, Jeong-Yong | - |
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