Cyclic CVD 법으로 증착된 TiN 박막의 증착 기구와 특성에 관한 연구A study on deposition mechanism and characteristics of TiN thin films deposited by Cyclic CVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강상원 | - |
| dc.contributor.advisor | Kang, Sang-Won | - |
| dc.contributor.author | 손영웅 | - |
| dc.contributor.author | Sohn, Young-Woong | - |
| dc.date.accessioned | 2011-12-15T01:30:54Z | - |
| dc.date.available | 2011-12-15T01:30:54Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114932&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50655 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ [iv], 67 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Cyclic CVD 법으로 증착된 TiN 박막의 증착 기구와 특성에 관한 연구 | - |
| dc.title.alternative | A study on deposition mechanism and characteristics of TiN thin films deposited by Cyclic CVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 114932/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953288 | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.localauthor | Kang, Sang-Won | - |
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