Pd게이트 MOS센서의 수소검지특성에 박막성질이 미치는 영향The effect of the thin film properties on the hydrogen sensing performance of Pd gate MOS sensor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 하정균 | - |
| dc.contributor.author | Ha, Jeong-Kyun | - |
| dc.date.accessioned | 2011-12-15T01:30:46Z | - |
| dc.date.available | 2011-12-15T01:30:46Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113161&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50647 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ ii, 63 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 박막 | - |
| dc.subject | 수소 | - |
| dc.subject | MOS 센서 | - |
| dc.subject | Pd gate | - |
| dc.subject | Pd gate | - |
| dc.subject | Thin film | - |
| dc.subject | Adsorption | - |
| dc.subject | Hydrogen | - |
| dc.subject | MOS sensor | - |
| dc.title | Pd게이트 MOS센서의 수소검지특성에 박막성질이 미치는 영향 | - |
| dc.title.alternative | The effect of the thin film properties on the hydrogen sensing performance of Pd gate MOS sensor | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113161/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953639 | - |
| dc.contributor.localauthor | 박종욱 | - |
| dc.contributor.localauthor | Park, Chong-Ook | - |
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