반응성 스퍼터링법으로 제조한 $PbTiO_3$ 박막의 응력분포에 따른 배향성의 변화에 관한 연구A study on stress distribution dependence of orientation ratio in $PbTiO_3$ thin film deposited by reactive sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 강석중 | - |
| dc.contributor.advisor | Kang, Suk-Joong L. | - |
| dc.contributor.author | 최원경 | - |
| dc.contributor.author | Choi, Won-Kyung | - |
| dc.date.accessioned | 2011-12-15T01:30:43Z | - |
| dc.date.available | 2011-12-15T01:30:43Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113158&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50644 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 98 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 분역구조 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | 응력 분포 | - |
| dc.subject | 배향도 | - |
| dc.subject | 유한요소 해석법 | - |
| dc.subject | FEM | - |
| dc.subject | Domain structure | - |
| dc.subject | Sputtering | - |
| dc.subject | Stress distribution | - |
| dc.subject | Orientation ratio | - |
| dc.title | 반응성 스퍼터링법으로 제조한 $PbTiO_3$ 박막의 응력분포에 따른 배향성의 변화에 관한 연구 | - |
| dc.title.alternative | A study on stress distribution dependence of orientation ratio in $PbTiO_3$ thin film deposited by reactive sputtering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 113158/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000953615 | - |
| dc.contributor.localauthor | 강석중 | - |
| dc.contributor.localauthor | Kang, Suk-Joong L. | - |
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