DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 강상원 | - |
dc.contributor.advisor | Kang, Sang-Won | - |
dc.contributor.author | 채정헌 | - |
dc.contributor.author | Chae, Jung-Hun | - |
dc.date.accessioned | 2011-12-15T01:30:42Z | - |
dc.date.available | 2011-12-15T01:30:42Z | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113157&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50643 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ xi, 73 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 다결정 실리콘 | - |
dc.subject | 테스트 패턴 | - |
dc.subject | 박막 | - |
dc.subject | 열팽창 계수 | - |
dc.subject | Thermal expansion coefficient | - |
dc.subject | Polycrystalline silicon | - |
dc.subject | MEMS | - |
dc.subject | Test pattern | - |
dc.subject | Thin film | - |
dc.title | 테스트 패턴을 이용한 다결정 실리콘 박막의 열팽창 계수 측정에 관한 연구 | - |
dc.title.alternative | Measurement of thermal expansion coefficient of polycrystalline silicon thin film by micro test patterns | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 113157/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000953601 | - |
dc.contributor.localauthor | 강상원 | - |
dc.contributor.localauthor | Kang, Sang-Won | - |
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