학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 64 p. ]
응력; 변태 온도; 타이타늄실리사이드; 코스퍼터링; 면저항; Sheet resistance; Stress; Transformation temperature; TiSi2; Cosputtering
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