미세결정질을 함유한 수소화된 비정질 실리콘(a-Si:H) 박막의 결정화 거동에 관한 연구A study on the crystallization behavior of hydrogenated amorphous silicon (a-Si:H) films containing microcrystalline silicon(μc-Si)
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106607/325007 / 000943039
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ 63 p. ]
- Keywords
결정화; 수소화된 미세결정질 실리콘; 박막 트랜지스터; TFT; Crystallization; Hydrogenated microcrystalline silicon(c-Si)
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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