TiN의 Cu 확산방지막 특성 및 그 특성 평가 방법에 관한 연구The properties and the characterization methods of TiN as a barrier against Cu diffusion
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박종욱 | - |
| dc.contributor.advisor | Park, Chong-Ook | - |
| dc.contributor.author | 이승윤 | - |
| dc.contributor.author | Lee, Seung-Yun | - |
| dc.date.accessioned | 2011-12-15T01:29:40Z | - |
| dc.date.available | 2011-12-15T01:29:40Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106174&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50581 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iii, 65 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 확산방지막 | - |
| dc.subject | 배선재료 | - |
| dc.subject | 금속공정 | - |
| dc.subject | TiN | - |
| dc.subject | CV Measurment | - |
| dc.subject | Diffusion Barrier | - |
| dc.subject | Cu | - |
| dc.title | TiN의 Cu 확산방지막 특성 및 그 특성 평가 방법에 관한 연구 | - |
| dc.title.alternative | The properties and the characterization methods of TiN as a barrier against Cu diffusion | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106174/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000943402 | - |
| dc.contributor.localauthor | 박종욱 | - |
| dc.contributor.localauthor | Park, Chong-Ook | - |
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