TiN의 Cu 확산방지막 특성 및 그 특성 평가 방법에 관한 연구 = The properties and the characterization methods of TiN as a barrier against Cu diffusion

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Advisors
박종욱researcherPark, Chong-Ookresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
106174/325007 / 000943402
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iii, 65 p. ]

Keywords

확산방지막; 배선재료; 금속공정; TiN; CV Measurment; Diffusion Barrier; Cu

URI
http://hdl.handle.net/10203/50581
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106174&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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