Ni/α-Si 계면에서 Ni 실리사이드 형성에 관한 연구A study of Ni silicide formation in Ni/α-Si system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이재영 | - |
| dc.contributor.advisor | Lee, Jai-Young | - |
| dc.contributor.author | 김홍성 | - |
| dc.contributor.author | Kim, Hong-Sung | - |
| dc.date.accessioned | 2011-12-15T01:29:30Z | - |
| dc.date.available | 2011-12-15T01:29:30Z | - |
| dc.date.issued | 1996 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106164&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50571 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ [iii], 54 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 성장기구 | - |
| dc.subject | 실리사이드 | - |
| dc.subject | 활성화 에너지 | - |
| dc.subject | Silicide | - |
| dc.subject | Activation Energy | - |
| dc.subject | Growth Kinetics Mechanism | - |
| dc.title | Ni/α-Si 계면에서 Ni 실리사이드 형성에 관한 연구 | - |
| dc.title.alternative | A study of Ni silicide formation in Ni/α-Si system | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 106164/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000943159 | - |
| dc.contributor.localauthor | 이재영 | - |
| dc.contributor.localauthor | Lee, Jai-Young | - |
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