필라멘트법에 의한 다이아몬드 기상 증착시 기체 압력과 기판 재료의 영향The effects of total gas pressure and substrate materials on diamond deposition by hot-filament-activated chemical vapour deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤덕용 | - |
| dc.contributor.advisor | Yoon, Duk-Yong | - |
| dc.contributor.author | 허종무 | - |
| dc.contributor.author | Huh, Jong-Moo | - |
| dc.date.accessioned | 2011-12-15T01:29:18Z | - |
| dc.date.available | 2011-12-15T01:29:18Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99484&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50559 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1995.2, [ 73 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Gas pressure | - |
| dc.title | 필라멘트법에 의한 다이아몬드 기상 증착시 기체 압력과 기판 재료의 영향 | - |
| dc.title.alternative | The effects of total gas pressure and substrate materials on diamond deposition by hot-filament-activated chemical vapour deposition | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99484/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000933545 | - |
| dc.contributor.localauthor | 윤덕용 | - |
| dc.contributor.localauthor | Yoon, Duk-Yong | - |
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