DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이재영 | - |
dc.contributor.advisor | Lee, Jae-Young | - |
dc.contributor.author | 김해열 | - |
dc.contributor.author | Kim, Hae-Yeol | - |
dc.date.accessioned | 2011-12-15T01:29:06Z | - |
dc.date.available | 2011-12-15T01:29:06Z | - |
dc.date.issued | 1995 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99471&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50546 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1995.2, [ 75 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | 플라즈마 화학증착법으로 제조한 비정질 실리콘박막의 결정화 거동에 미치는 수소의 영향 | - |
dc.title.alternative | Hydrogen effects on the behavior of crystallization of amorphous silicon films prepared by plasma enhanced chemical vapor deposition | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 99471/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000933144 | - |
dc.contributor.localauthor | 이재영 | - |
dc.contributor.localauthor | Lee, Jae-Young | - |
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