플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 박막의 에칭 특성에 관한 연구A study on etching properties of aluminum oxide films deposited by plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 정진기 | - |
| dc.contributor.author | Jung, Jin-Ki | - |
| dc.date.accessioned | 2011-12-15T01:28:08Z | - |
| dc.date.available | 2011-12-15T01:28:08Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68061&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50485 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1991.2, [ [iv], 85 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 박막의 에칭 특성에 관한 연구 | - |
| dc.title.alternative | A study on etching properties of aluminum oxide films deposited by plasma enhanced chemical vapor deposition | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 68061/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000891464 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
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