DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 임호빈 | - |
dc.contributor.advisor | Im, Ho-Bin | - |
dc.contributor.author | 이희승 | - |
dc.contributor.author | Lee, Heui-Seung | - |
dc.date.accessioned | 2011-12-15T01:28:05Z | - |
dc.date.available | 2011-12-15T01:28:05Z | - |
dc.date.issued | 1991 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68058&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/50482 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1991.2, [ iii, 53 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.title | $p^+$ polysilicon 층 위에 저압화학증착된 $WSi_x$ 박막의 열처리에 따른 전기적 특성 | - |
dc.title.alternative | Electrical properties of annealed $WSi_x$ films depostied on $p^+$ polysilicon by LPCVD | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 68058/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000891416 | - |
dc.contributor.localauthor | 임호빈 | - |
dc.contributor.localauthor | Im, Ho-Bin | - |
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