학위논문(박사) - 한국과학기술원 : 재료공학과, 2003.2, [ viii, 90 p. ]
연마속도율속단계; 연마속도; 화학기계적 연마; 슬러리 두께; Slurry Thickness; polishing rate limiting step; polishing rate; Chemical-Mechanical Polishing
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.