Bottom-up fill of submicron features in catalyst-enhanced chemical vapor deposition of copper = 촉매처리에 의한 Cu CECVD의 Bottom-up fill 현상에 관한 연구

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 507
  • Download : 0
A formation process for copper bottom-up fillings of submicron via holes and trenches using iodine as a catalytic surfactant and hexafluoroacetylacetonate-copper-vinyltrimethylsilane $[(hfac)Cu^I(vtms)]$ in catalyst-enhanced chemical vapor deposition (CECVD) of copper is presented. During the copper deposition, the film growth rate of copper at the bottom of the features is continuously accelerated until the completion of the bottom-up filling, and this results in the bottom-up filling of the submicron features has been previously considered not viable in vacuum deposition techniques. The accelerated film growth appears to be due to the accumulation of the catalytic surfactant of iodine onto the surface of the copper films growing at the bottom of the submicron features that is considered as the result of the reduction of the side-wall area in the submicron features as the film grows. The newly developed technique for the copper bottom-up filling of submicron features will give a great impact on on-chip copper interconnects for the next generation of microelectronic devices. Moreover, the film growth mode in a bottom-up fashion on submicron features is expected to be universal to other systems of chemical vapor deposition, which use a catalytic surfactant.
Advisors
Kang, Sang-Wonresearcher강상원researcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2001
Identifier
169629/325007 / 000965220
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.8, [ ix, 142 p. ]

Keywords

chemical vapor deposition; catalyst; copper; iodine; 요오드; 화학기상증착법; 촉매; 구리; bottom-up fill

URI
http://hdl.handle.net/10203/50436
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=169629&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0