RF magnetron sputtering법으로 증착된 PZT 박막의 증착특성 및 광소자로의 응용에 관한 연구A study on the deposition characteristics and the application to optical devices of the PZT films deposited by RF magnetron sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 강희수 | - |
| dc.contributor.author | Kang, Hee-Soo | - |
| dc.date.accessioned | 2011-12-15T01:07:12Z | - |
| dc.date.available | 2011-12-15T01:07:12Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=169593&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50433 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.8, [ vi, 141 p ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 열처리조건 | - |
| dc.subject | 증착온도 | - |
| dc.subject | 광도파로 | - |
| dc.subject | 전광계수 | - |
| dc.subject | PZT | - |
| dc.subject | crack | - |
| dc.subject | seed layer | - |
| dc.subject | electro-optic coefficient | - |
| dc.subject | sputtering | - |
| dc.title | RF magnetron sputtering법으로 증착된 PZT 박막의 증착특성 및 광소자로의 응용에 관한 연구 | - |
| dc.title.alternative | A study on the deposition characteristics and the application to optical devices of the PZT films deposited by RF magnetron sputtering | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 169593/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000965017 | - |
| dc.contributor.localauthor | 강희수 | - |
| dc.contributor.localauthor | Kang, Hee-Soo | - |
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