학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.2, [ ix, 91 p. ]
TiN; Adsorption; ALD Kinetic model; Atomic Layer Deposition; Adsorption rate constant; 흡착 속도 상수; 재흡착; 흡착확률; 동역학적 모델; 원자층 증착법
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