유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구A study on the etching characteristics of PZT films using Inductively coupled Plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 정진기 | - |
| dc.contributor.author | Jung, Jin-Ki | - |
| dc.date.accessioned | 2011-12-15T01:06:48Z | - |
| dc.date.available | 2011-12-15T01:06:48Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165735&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50409 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.2, [ vi, 91 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Cl2 | - |
| dc.subject | PZT | - |
| dc.subject | 건식식각 | - |
| dc.subject | 유도결합 플라즈마 | - |
| dc.subject | CF4 | - |
| dc.subject | CF4 | - |
| dc.subject | Cl2 | - |
| dc.subject | PZT | - |
| dc.subject | dry etching | - |
| dc.subject | inductively coupled plasma | - |
| dc.title | 유도결합 플라즈마를 이용한 PZT 박막의 건식에칭 특성에 관한 연구 | - |
| dc.title.alternative | A study on the etching characteristics of PZT films using Inductively coupled Plasma | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 165735/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000965828 | - |
| dc.contributor.localauthor | 정진기 | - |
| dc.contributor.localauthor | Jung, Jin-Ki | - |
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