학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.8, [ xix, 177 p. ]
Kinetics; Structural properties; Plasma oxide; ICP; Poly-Si TFT; 다결정실리콘 박막트랜즈스터; 운동학; 구조적 특성; 플라즈마산화막; 유도결합플라즈마
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