구리 박막과 반응성 플라즈마의 건식 식각반응 특성에 관한 연구A study on the characteristics of dry etch reactions between Cu thin film and reactive plasmas

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dc.contributor.advisor이정용-
dc.contributor.advisorLee, Jeong-Yong-
dc.contributor.author권명석-
dc.contributor.authorKwon, Myoung-Seok-
dc.date.accessioned2011-12-15T01:05:45Z-
dc.date.available2011-12-15T01:05:45Z-
dc.date.issued1999-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150157&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/50347-
dc.description학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.2, [ ix, 102 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subjectReaction mechanism-
dc.subjectReaction characteristics-
dc.subjectDry etching-
dc.subjectReactive plasma-
dc.subjectCu-
dc.subject반응 기구-
dc.subject반응 특성-
dc.subject반응성 플라즈마-
dc.subject건식 식각-
dc.subject구리-
dc.title구리 박막과 반응성 플라즈마의 건식 식각반응 특성에 관한 연구-
dc.title.alternativeA study on the characteristics of dry etch reactions between Cu thin film and reactive plasmas-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN150157/325007-
dc.description.department한국과학기술원 : 재료공학과, -
dc.identifier.uid000945025-
dc.contributor.localauthor권명석-
dc.contributor.localauthorKwon, Myoung-Seok-
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