ECR-PEMOCVD법을 이용한 $SrTiO_3$박막과 $(BaSr)TiO_3$ 박막의 제조 및 특성분석Fabrication and characterization of $SrTiO_3$ and $BaSrTiO_3$ thin films using ECR-PEMOCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 노광수 | - |
| dc.contributor.advisor | No, Kwang-Soo | - |
| dc.contributor.author | 이준성 | - |
| dc.contributor.author | Lee, Joon-Sung | - |
| dc.date.accessioned | 2011-12-15T01:05:43Z | - |
| dc.date.available | 2011-12-15T01:05:43Z | - |
| dc.date.issued | 1998 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143462&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50345 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.2, [ x, 150 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 암모니아 운반기체 | - |
| dc.subject | ECR플라즈마를 이용한 화학기상증착법 | - |
| dc.subject | 바륨스트론튬타이타네이트 | - |
| dc.subject | 스트론튬타이타네이트 | - |
| dc.subject | 화학결합상태 | - |
| dc.subject | Chemical bonding state | - |
| dc.subject | NH3 carrier gas | - |
| dc.subject | ECR-PEMOCVD | - |
| dc.subject | BST | - |
| dc.subject | SrTiO3 | - |
| dc.title | ECR-PEMOCVD법을 이용한 $SrTiO_3$박막과 $(BaSr)TiO_3$ 박막의 제조 및 특성분석 | - |
| dc.title.alternative | Fabrication and characterization of $SrTiO_3$ and $BaSrTiO_3$ thin films using ECR-PEMOCVD | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 143462/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000945333 | - |
| dc.contributor.localauthor | 이준성 | - |
| dc.contributor.localauthor | Lee, Joon-Sung | - |
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