학위논문(박사) - 한국과학기술원 : 재료공학과, 1998.8, [ x, 153 p. ]
Ta-Si-N; Failure mechanism; Amorphous; Diffusion barrier; Cu metallization; 파괴기구; 탄탈륨-실리콘-질소; 비정질; 구리 배선; 확산방지막
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