ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 김성태 | - |
| dc.contributor.author | Kim, Sung-Tae | - |
| dc.date.accessioned | 2011-12-15T01:05:38Z | - |
| dc.date.available | 2011-12-15T01:05:38Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113001&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50340 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 136 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | Pt 기판 | - |
| dc.subject | 활성화 | - |
| dc.subject | ECR 프라즈마 | - |
| dc.subject | PZT 박막 | - |
| dc.subject | Lead zirconate titanate | - |
| dc.subject | Platinum substrate | - |
| dc.subject | Activation | - |
| dc.subject | ECR plasma | - |
| dc.subject | Sputtering | - |
| dc.title | ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구 | - |
| dc.title.alternative | Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputtering | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 113001/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000935050 | - |
| dc.contributor.localauthor | 김성태 | - |
| dc.contributor.localauthor | Kim, Sung-Tae | - |
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