Ti 박막으로 부터 급속 열처리에 의한 $TiSi_2$ 형성에 관한 연구A study on the formation of $TiSi_2$ from thin Ti film by rapid thermal process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | 박신종 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.advisor | Park, Sin-Chong | - |
| dc.contributor.author | 강상원 | - |
| dc.contributor.author | Kang, Sang-Won | - |
| dc.date.accessioned | 2011-12-15T01:05:32Z | - |
| dc.date.available | 2011-12-15T01:05:32Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61568&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50333 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.2, [ iv, 137 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Ti 박막으로 부터 급속 열처리에 의한 $TiSi_2$ 형성에 관한 연구 | - |
| dc.title.alternative | A study on the formation of $TiSi_2$ from thin Ti film by rapid thermal process | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61568/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000765001 | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.localauthor | Kang, Sang-Won | - |
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